Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses

Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses
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DOI:
10.1063/1.4832829
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发表时间:
2013-11
影响因子:
3.2
通讯作者:
L. Gemini;M. Hashida;M. Shimizu;Y. Miyasaka;S. Inoue;S. Tokita;J. Limpouch;T. Mocek;S. Sakabe
L. Gemini;M. Hashida;M. Shimizu;Y. Miyasaka;S. Inoue;S. Tokita;J. Limpouch;T. Mocek;S. Sakabe
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
L. Gemini;M. Hashida;M. Shimizu;Y. Miyasaka;S. Inoue;S. Tokita;J. Limpouch;T. Mocek;S. Sakabe

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用飞秒激光脉冲在硅和碳化硅表面形成周期结构。在略高于烧蚀阈值的激光通量范围内,在大量脉冲照射下,硅和碳化硅表面出现空间周期约为600 nm的自组织结构。与金属的情况一样,空间周期性对激光影响的依赖可以用激光在表面等离子体波中的参量衰减来解释。结果表明,该模型可以普遍适用于任何固态材料。
Periodic structures were generated on Si and SiC surfaces by irradiation with femtosecond laser pulses. Self-organized structures with spatial periodicity of approximately 600 nm appear on silicon and silicon carbide in the laser fluence range just above the ablation threshold and upon irradiation with a large number of pulses. As in the case of metals, the dependence of the spatial periodicity on laser fluence can be explained by the parametric decay of laser light into surface plasma waves. The results show that the proposed model might be universally applicable to any solid state material.