Fabrication and Evaluation of YBa2Cu3O7-δ Probe for Scanning Probe Microscopy
Fabrication and Evaluation of YBa2Cu3O7-δ Probe for Scanning Probe Microscopy
复制标题
扫描探针显微镜用 YBa2Cu3O7-δ 探针的制作和评估
DOI：
10.1109/tasc.2023.3235955
复制
发表时间：
2023
影响因子：
1.8
通讯作者：
and N. Hiroshiba
中科院分区：
文献类型：
--
作者：
S. Ariyoshi;A. Ebata;B. Ohnishi;S. Ohnishi;T. Kanada;K. Hayashi;Y. Miyato;S. Tanaka;and N. Hiroshiba
提出、制备并评价了一种用于扫描探针显微镜的高温超导YBa_2Cu_3O_（7-δ）（YBCO）探针。使用精细切割机将c轴取向的块体切割成矩形实心棒（0.5 × 0.5 × 10 mm 3）。棒的转变温度约为90 K，这与原始块体的转变温度几乎相同，表明由于切割过程，对超导性没有临界损伤。将棒的一端抛光成曲率半径<100 μm的金字塔形状，并使用聚焦Ga离子束将顶点进一步锐化至101 μm。当加速电压为40 kV时，Ga离子从YBCO表面的穿透深度远小于1 μm，表明Ga离子在棒内的化学成分是守恒的。将YBCO探针安装在原子力显微镜（AFM）中，此时探针温度设定为300 K。根据针尖半径，通过将探针粘到石英音叉上获得清晰的AFM图像。
We proposed, fabricated, and evaluated a high-temperature superconducting probe made of YBa2Cu3O7-δ(YBCO) for scanning probe microscopy. A c-axis-oriented bulk was cut into a rectangular solid rod (0.5 × 0.5 × 10 mm3) using a fine cutter machine. The transition temperature of the rod was approximately 90 K, which was almost the same as that of the original bulk, indicating no critical damage to the superconductivity owing to the cutting process. One end of the rod was polished to a pyramid shape with <100-μm radius of curvature, and the apex was further sharpened to ∼1 μm using a focused Ga ion beam. The penetration depth of Ga ions from the YBCO surface was much less than 1 μm at an acceleration voltage of 40 kV, suggesting that the chemical composition was conserved inside the rod. An YBCO probe was installed in an atomic force microscope (AFM), where the probe temperature was set at 300 K at the time. Depending on the tip radius, a clear AFM image was obtained by gluing the probe to a quartz-tuning fork.