Subtractive patterning: High-resolution electrohydrodynamic jet printing with solvents
Subtractive patterning: High-resolution electrohydrodynamic jet printing with solvents
复制标题
DOI：
10.1063/5.0021038
复制
发表时间：
2020-09
影响因子：
4
通讯作者：
Nazanin Farjam;Tae H. Cho;N. Dasgupta;K. Barton
中科院分区：
文献类型：
--
作者：
Nazanin Farjam;Tae H. Cho;N. Dasgupta;K. Barton
3D打印的进步开创了设备制造的典范。电流体动力喷射（e-jet）打印是一种高分辨率3D打印方法，可以实现薄膜结构的定制图案，同时降低制造复杂性，并实现各种材料的高分辨率图案。然而，到目前为止，电子喷射打印主要集中在添加剂材料沉积，而不是通过材料减法图案。这项工作提出了基于位移的电子喷射打印，使用溶剂油墨进行聚合物薄膜的减法图案，在x-y平面上具有微尺度分辨率，在z（溶解）方向上具有纳米尺度控制。利用原子力显微镜对基于位移的电子喷射打印行为进行了表征，并提出了控制线宽和位移深度的两种方法。提供了一个基于位移的电子喷射图案的区域选择性薄膜沉积的例子，以证明这种图案技术对可印刷的微尺度器件的适用性。
Advancements in 3D printing have initiated a paradigm in device fabrication. Electrohydrodynamic jet (e-jet) printing is a high-resolution 3D printing method that enables customizable patterning of thin-film structures, while reducing fabrication complexity and achieving high-resolution patterns with a wide variety of materials. However, to date, e-jet printing has focused on additive material deposition, rather than patterning through material subtraction. This work proposes displacement-based e-jet printing using solvent inks for subtractive patterning of polymer thin films, with microscale resolution in the x–y plane and nanoscale control in the z (dissolving) direction. The behavior of displacement-based e-jet printing is characterized using atomic force microscopy, and two methodologies are developed for controlling the linewidth and displaced depth. An example of area-selective thin film deposition on displacement-based e-jet patterns is provided to demonstrate the applicability of this patterning technique for printable microscale devices.