Comb-drive actuators for large displacements
Comb-drive actuators for large displacements
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DOI：
10.1088/0960-1317/6/3/004
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发表时间：
1996-09-01
影响因子：
2.3
通讯作者：
Elwenspoek, M
中科院分区：
文献类型：
--
作者：
Legtenberg, R;Groeneveld, AW;Elwenspoek, M
介绍了低驱动电压下大位移横向梳状驱动器的设计、制作和实验结果。对几种悬挂方案进行了比较，并对固支梁和折弯设计的横向大挠度行为进行了模拟。文中还给出了考虑横向位移弯曲效应的折弯设计的轴向弹簧常数的表达式。梳状驱动器所能获得的最大挠度受机电侧不稳定的限制。给出了侧失稳电压和由此产生的侧失稳位移的表达式。谐振频率附近的机电行为用等效电路来描述。器件采用多晶硅表面微机械加工技术，采用单掩模制造工艺。通过实验确定了其静、动态特性，并与理论进行了比较。静态特性由位移-电压、电容-电压和吸合电压测量确定。使用单端口方法，从测量的导纳图中提取动态特性。典型的致动器特性是在20V左右的驱动电压下约30微米的偏转，1.6 kHz左右的谐振频率和约3的品质因数。
The design, fabrication and experimental results of lateral-comb-drive actuators for large displacements at low driving voltages is presented. A comparison of several suspension designs is given, and the lateral large deflection behaviour of clamped-clamped beams and a folded flexure design is modelled. An expression for the axial spring constant of folded flexure designs including bending effects from lateral displacements, which reduce the axial stiffness, is also derived. The maximum deflection that can be obtained by comb-drive actuators is bounded by electromechanical side instability. Expressions for the side-instability voltage and the resulting displacement at side instability are given. The electromechanical behaviour around the resonance frequency is described by an equivalent electric circuit. Devices are fabricated by polysilicon surface micromachining techniques using a one-mask fabrication process. Static and dynamic properties are determined experimentally and are compared with theory. Static properties are determined by displacement-to-voltage, capacitance-to-voltage and pull-in voltage measurements. Using a one-port approach, dynamic properties are extracted from measured admittance plots. Typical actuator characteristics are deflections of about 30 mu m at driving voltages around 20 V, a resonance frequency around 1.6 kHz and a quality factor of approximately 3.