Design of Micromachined Vibratory Gyroscope With Two Degree-of-Freedom Drive-Mode and Sense-Mode
Design of Micromachined Vibratory Gyroscope With Two Degree-of-Freedom Drive-Mode and Sense-Mode
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DOI：
10.1109/jsen.2012.2192497
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发表时间：
2012-07-01
影响因子：
4.3
通讯作者：
Sun, Feng
中科院分区：
文献类型：
--
作者：
Wang, Wei;Lv, Xiaoyong;Sun, Feng
本文提出了一种新型的微机械振动陀螺仪，其中两个自由度（2-DOF）的结构，两个质量和三个弹簧被用于驱动模式和传感模式。2-DOF动态结构提供了两种模式对结构和环境变化的固有鲁棒性。所提出的陀螺仪演示驱动模式3-dB带宽为190 Hz和感测模式3-dB带宽为300 Hz，在工作频率为5.0 kHz。仿真结果表明，在4.90-5.09 kHz范围内，驱动模式与传感模式的谐振频率和带宽高度匹配。该陀螺仪在4.90-5.09 kHz范围内稳定工作。该器件具有快速启动和抑制脉冲噪声的特点。
In this paper, a novel micromachined vibratory gyroscope is proposed, where a two degree-of-freedom (2-DOF) architecture with two masses and three springs is utilized in both drive-mode and sense-mode. The 2-DOF dynamic structure provides the inherently robustness of both modes against structural and environmental variations. The proposed gyroscope demonstrates drive-mode 3-dB bandwidth of 190 Hz and sense-mode 3-dB bandwidth of 300 Hz at the operational frequency 5.0 kHz. The simulation results confirmed that the resonant frequency and bandwidth of the drive-mode are highly matched with those of sense-mode in the region of 4.90-5.09 kHz. So the gyroscope can be operated robustly in the region of 4.90-5.09 kHz. The proposed device can also be started quickly and suppress the pulse noise.