Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system
Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system
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通过使用共焦光学系统测量荧光信号来感测垂直表面
DOI：
10.1088/0957-0233/25/6/064004
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发表时间：
2014
影响因子：
2.4
通讯作者：
Y. Takaya
中科院分区：
文献类型：
--
作者：
M. Michihata;A. Fukui;T. Hayashi;Y. Takaya
我们已经开发了一种利用荧光信号来感测垂直表面的光学技术。测量的表面涂覆有荧光染料。首先，从表面的荧光发射的角度范围进行了实验研究。实验结果表明，荧光在与表面成大于10°的宽角度范围内发射，该角度足够宽以能够检测垂直表面。第二，荧光染料涂覆的硅晶片的表面感测使用荧光共焦光学系统。用激光束水平扫描垂直表面，发现检测到的信号在半峰全宽处具有3 µm的特定峰。因此，荧光共焦光学系统成功地感测到垂直表面。
We have developed an optical technique for sensing a vertical surface by utilizing fluorescence signals. The measured surface was coated with a fluorescent dye. First, the angular range of the fluorescence emission from the surface was experimentally investigated. The experimental results revealed that the fluorescence was emitted over a wide range of angles greater than 10° from the surface, which is wide enough to enable the detection of a vertical surface. Second, the surface of a fluorescent-dye-coated silicon wafer was sensed using a fluorescent confocal optical system. The vertical surface was scanned horizontally with a laser beam, and the detected signal was found to have a specific peak of 3 µm at full width at half maximum. Thus, the vertical surface was sensed successfully by the fluorescent confocal optical system.