Application of a novel fibre-coupled confocal sensor in a nanopositioning and nanomeasuring machine
Application of a novel fibre-coupled confocal sensor in a nanopositioning and nanomeasuring machine
复制标题
新型光纤耦合共焦传感器在纳米定位和纳米测量机中的应用
DOI：
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发表时间：
2012
期刊：
影响因子：
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通讯作者：
G. Jäger
中科院分区：
文献类型：
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作者：
F. Balzer;U. Gerhardt;T. Hausotte;K. Albrecht;E. Manske;G. Jäger
本文介绍了一种新型的光纤耦合共焦传感器的光学，非触觉测量的微结构的过程测量和传感器技术研究所开发的。介绍了该系统的工作原理、性能分析以及使用SIOS Meßtechnik GmbH公司生产的NMM-1纳米定位和纳米测量机（NPMM）的实验结果。
This article introduces a novel fibre-coupled confocal sensor for optical, non-tactile measurement of microstructures developed at the Institute of Process Measurement and Sensor Technology. The functional principle and an analysis of its metrological properties as well as some experimental results using the NMM-1, a nanopositioning and nanomeasuring machine (NPMM) manufactured by SIOS Meßtechnik GmbH, are presented.