Application of an array sensor based on plasma-deposited organic film coated quartz crystal resonators to monitoring indoor volatile compounds
Application of an array sensor based on plasma-deposited organic film coated quartz crystal resonators to monitoring indoor volatile compounds
复制标题
基于等离子体沉积有机薄膜涂层石英晶体谐振器的阵列传感器在室内挥发性化合物监测中的应用
DOI：
10.1109/jsen.2002.804576
复制
发表时间：
2002
影响因子：
4.3
通讯作者：
T. Miyagi
中科院分区：
文献类型：
--
作者：
M. Seyama;I. Sugimoto;T. Miyagi
研究了基于等离子体沉积有机薄膜涂层石英晶体谐振器（QCR）的阵列传感器的基本响应能力，以期将其用于室内空气监测。等离子体沉积的有机薄膜涂层的QCR阵列被应用于检测和分离挥发性有机化合物（VOCs），包括烷烃，芳香族碳，氯代烃，酮和醇。在真实的室内环境（茶点区和吸烟区）中尝试了连续监测测试，其中具有等离子体沉积的有机膜涂覆的QCR阵列沿着具有用于室内监测的商业传感器、相对湿度/温度传感器、二氧化碳传感器和三维微超声气流计。为了提供比较，使用了基于光电离检测器和半导体的用于室内监测测试的商业VOC检测器。等离子体沉积的有机薄膜涂层QCR表现出快速的脉冲响应，在室内空气中的挥发性化合物沿着基线偏移与相对湿度的变化和更灵敏的响应相比，商业有机气体检测器。
The basic response ability of an array sensor based on plasma-deposited organic film-coated quartz crystal resonators (QCRs) was investigated with a view to their use for indoor air monitoring. The array of plasma-deposited organic film-coated QCRs was applied to detect and separate volatile organic compounds (VOCs) including alkanes, aromatic carbons, chlorocarbons, ketones, and alcohols. Continuous monitoring tests were tried in a real room environment (a refreshment area and a smoking area) with an array of plasma-deposited organic film-coated QCRs along with commercial sensors for indoor monitoring, a relative humidity/temperature sensor, a carbon dioxide sensor, and a three-dimensional micro-ultrasonic airflow meter. To provide a comparison commercial VOC detectors based on a photo-ionization detector and a semiconductor for indoor monitoring tests were used. The plasma-deposited organic film-coated QCRs exhibited fast pulse responses to volatile compounds in the room air along the baseline shift correlated with relative humidity changes and more sensitive responses compared with commercial organic gas detectors.