Investigation of precession laser machining of microholes in aerospace material
Investigation of precession laser machining of microholes in aerospace material
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DOI：
10.2351/7.0000903
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发表时间：
2023-02
影响因子：
2.1
通讯作者：
Hoang Le;Vahid Nasrollahi;Themistoklis Karkantonis;P. Penchev;S. Marimuthu;Mickey Crozier;S. Dimov
中科院分区：
文献类型：
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作者：
Hoang Le;Vahid Nasrollahi;Themistoklis Karkantonis;P. Penchev;S. Marimuthu;Mickey Crozier;S. Dimov
侧壁锥化是超短脉冲激光加工的主要缺陷之一，它与激光束的形状和自限效应有关。用进动光束进行激光加工是克服这一限制的一种潜在解决方案。本文研究了进动参数对镍合金微孔钻削锥度角的影响。详细研究了进动的入射角、进动焦点与单光束的相对距离和扫描速度等三个关键参数的影响。在0.6 ~ 2mm厚的镍合金衬底上进行了直径为100 ~ 500 μm、纵横比为20:1的钻孔实验。实验结果表明，所有考虑的参数/因素都是显著的，并且以不同的方式影响孔锥度。此外，在某些情况下，入射角和焦点位置这两个因素之间存在重要的交互作用。提出了减小锥效应的最佳参数，并对其机理进行了详细的讨论。进动激光加工在克服常规USP激光加工的局限性方面显示出明显的优势。利用进动梁制造具有高几何精度的微孔，即具有直侧壁和零锥度角的微孔是可行的。结果清楚地显示了进动激光加工的潜力，以及该技术可以为微电子、汽车和航空航天等不同行业的一系列激光微加工应用提供的能力。
Sidewall tapering is one of the main limitations in ultrashort pulse (USP) laser machining and is associated with the beam shape and self-limiting effect. Laser processing with a precession beam is a potential solution to overcome this limitation. A study into the effects of precession parameters on the taper angle in microhole drilling of a nickel alloy is reported in this paper. The effects of three key precession parameters, i.e., incident angle, relative distance between the focuses of the precession and individual beams, and scanning speed, have been investigated in detail. Experiments were performed to drill through holes with aspect ratios up to 20:1 and diameters ranging from 100 to 500 μm over 0.6–2 mm thick nickel alloy substrates. Experiment results showed that all the considered parameters/factors were significant and affected the hole tapering in different ways. In addition, there were important interaction effects between two of the factors, i.e., incident angle and focus position, in some cases. The optimal parameters to minimize the tapering effect are suggested, and the mechanism is discussed in detail. The precession laser machining showed clear advantages in overcoming the limitations to associated with conventional USP laser machining. Fabricating microholes with high geometrical accuracy, i.e., with straight side walls and zero taper angles, is feasible with the use of a precession beam. The results clearly show the potential of precession laser processing and the capabilities that the technology can offer for a range of laser micromachining applications in different industries, such as microelectronics, automotive, and aerospace.