Electron Microscopy and Diffraction Studies of the Structure of Amorphous WO3 Film

Electron Microscopy and Diffraction Studies of the Structure of Amorphous WO3 Film
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非晶WO3薄膜结构的电子显微镜和衍射研究

DOI:
10.1143/jjap.24.117
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发表时间:
1985
影响因子:
1.5
通讯作者:
Yoshio Saito
Yoshio Saito
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
C. Kaito;T. Shimizu;Y. Nakata;Yoshio Saito

文献摘要

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对真空沉积制备的WO3薄膜进行了高分辨率电子显微镜观察和电子衍射中非晶晕的分析。在显微照片中经常看到形成尺寸约为1 nm的区域的交叉条纹,并且它们的每个间距对应于WO3晶体的晶格间距。倾斜薄膜时,某些区域的晶格条纹消失,并且在不同位置出现新的条纹。这表明微晶在薄膜中随机分布。实验电子衍射强度通过微晶模型来解释,其中微晶以0.8、1.0和1.2 nm的尺寸随机分布,比例分别为23%、54%和23%。
High-resolution electron-microscopic observation and analysis of the amorphous halos in electron diffraction have been carried out on WO3 film prepared by vacuum deposition. Crossed fringes forming a region about 1 nm in size are frequently seen in the micrographs, and each of their spacings corresponds to that of the lattice spacing of the WO3 crystal. On tilting the film, the lattice fringes in some regions disappeared and new fringes appeared at different positions. This shows that the micro-crystallites are distributed at random in the film. The experimental electron diffraction intensity is explained by a micro-crystal model in which microcrystallites are distributed at random with sizes of 0.8, 1.0 and 1.2 nm at ratios of 23, 54 and 23%, respectively.