Goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out-of-plane and polarimetry capabilities
Goniometric optical scatter instrument for bidirectional reflectance distribution function measurements with out-of-plane and polarimetry capabilities
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DOI：
10.1117/12.279240
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发表时间：
1997-09
期刊：
影响因子：
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通讯作者：
T. Germer;C. Asmail
中科院分区：
文献类型：
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作者：
T. Germer;C. Asmail
美国国家标准与技术研究所开发了一种测角光学散射仪器，可以轻松执行光学散射的面外测量以及偏振测量。本文使用该仪器的描述作为平台，讨论在开发平面外测量功能或偏振测量功能或同时开发两者时必须解决的关键问题。已经进行了从样品坐标到仪器坐标的转换，包括用于面外测量的偏振坐标的旋转。计算空气中瑞利散射产生的平面外仪器特征并将其与测量结果进行比较。最后，给出了硅晶圆背面的一些面外 Mueller 矩阵 BRDF 测量结果。
A goniometric optical scatter instrument has been developed at the National Institute of Standards and Technology which can readily perform out-of-plane measurements of optical scatter as well as polarimetric measurements. This paper uses the description of this instrument as a platform to discuss key issues that must be addressed when developing either out-of- plane measurement capabilities or polarimetric capabilities, or both at the same time. The transformation from the sample coordinates to the instrument coordinates has been carried out, including the rotation of the polarization coordinates for out-of-plane measurements. The out-of-plane instrument signature that results from Rayleigh scatter in air is calculated and compared with measurement. Finally, the results of some out-of-plane Mueller matrix BRDF measurements of the backside of a silicon wafer are presented.