Influence of master fabrication techniques on the characteristics of embossed microfluidic channels
Influence of master fabrication techniques on the characteristics of embossed microfluidic channels
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DOI：
10.1039/b300730h
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发表时间：
2003-01-01
期刊：
影响因子：
6.1
通讯作者：
Genova, V
中科院分区：
文献类型：
--
作者：
Esch, MB;Kapur, S;Genova, V
我们描述了使用许多不同的压花母版在塑料中制造微流体装置的协议。通过硅（100）的深反应离子蚀刻（DRIE）、硅（100）和（110）的湿法蚀刻以及SU-8处理来制造母版。模压到环烯烃聚合物中的结构的特征在于图案转移的质量以及表面粗糙度。高质量的图案转移实现与母版包含结构与倾斜的侧壁。通过使用由SU-8（其热膨胀系数接近基材的热膨胀系数）组成的母版，使去压花期间发生的图案变形最小化。用SU-8母版压印的结构也表现出最低的表面粗糙度。然而，由于结构变形，为这项研究准备的母版的可重复使用性扩展到只有五个压花实验。另一方面，在硅上制造的母版更坚固，但在实验的去压花阶段容易破裂。这项研究的结果将指导研究人员选择主制造方法，这些方法将提供有利于其特定应用的压花微流体通道的轮廓和表面特性。
We describe protocols for the fabrication of microfluidic devices in plastics using a number of different embossing masters. Masters were fabricated by deep reactive ion etching (DRIE) of silicon (100), wet etching of silicon (100) and (110), and SU-8 processing. Structures embossed into a cyclo-olefin polymer were characterized in terms of the quality of pattern transfer as well as of the surface roughness. High quality pattern transfer was achieved with masters containing structures with angled sidewalls. Pattern distortions occurring during de-embossing were minimized by using masters consisting of SU-8 (which has a thermal expansion coefficient close to that of the substrates). Structures embossed with SU-8 masters also exhibited the lowest surface roughness. However, due to structural deformation, the reusability of the masters prepared for this study extended to only five embossing experiments. Masters fabricated on silicon, on the other hand, were more robust, but were subject to breakage during the de-embossing phase of the experiment. The results of this study will guide researchers in choosing master fabrication methods that will provide profile and surface characteristics of embossed microfluidic channels that are advantageous to their specific application.