Partial-electroded ZnO pyroelectric sensors for responsivity improvement
Partial-electroded ZnO pyroelectric sensors for responsivity improvement
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DOI：
10.1016/j.sna.2005.12.044
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发表时间：
2006-03-31
影响因子：
4.6
通讯作者：
Chang, SH
中科院分区：
文献类型：
--
作者：
Wei, CS;Lin, YY;Chang, SH
介绍了用于提高响应率的 ZnO 热释电传感器的设计、MEMS 制造和表征。制作并研究了三组具有不同层厚、有效面积、部分和完全覆盖电极（FCE）的传感器。部分覆盖电极 (PCE) 覆盖暴露表面的 50-65% 面积，用于吸收入射能量。未覆盖的ZnO将直接接收入射激光能量，提高传感器的吸收效率。测量数据表明，部分电极传感器在10-1000 Hz频率范围内表现出比全电极传感器至少高4倍的响应度。还讨论了其他设计参数（例如 ZnO、SiO2 和 Si3N4 的厚度）对响应率的影响。 (c) 2006 Elsevier B.V. 保留所有权利。
The design, MEMS fabrication and characterization of the ZnO pyroelectric sensor for improvement of responsivity are presented. Three groups of the sensor with various layer thickness, effective area, partially and fully covered electrode (FCE) were fabricated and investigated. The partially covered electrode (PCE) covers 50-65% area of the exposed surface for incident energy absorption. The un-covered ZnO will directly receive the incident laser energy and improve the absorption efficiency of the sensor. The measured data show that the partial-electroded sensors exhibits at least 4 times higher responsivity in the frequency range of 10-1000 Hz than the full-electroded sensors. The effects of other design parameters such as thickness of ZnO, SiO2 and Si3N4 on the responsivity are also discussed. (c) 2006 Elsevier B.V. All rights reserved.