Reducing leakage current during periodic poling of ion-sliced x-cut MgO doped lithium niobate thin films
Reducing leakage current during periodic poling of ion-sliced x-cut MgO doped lithium niobate thin films
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DOI：
10.1364/ome.9.003146
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发表时间：
2019-07-01
影响因子：
2.8
通讯作者：
Reano, Ronald M.
中科院分区：
文献类型：
--
作者：
Nagy, Jonathan Tyler;Reano, Ronald M.
离子切片的锂离子酸盐薄膜提供了高的光学约束超过其散装计数器部分，使紧凑和有效的非线性光学。然而，由于大的漏电流，特别是在大量使用以减少光折变损伤的氧化镁掺杂的锂酸盐中，通过薄膜锂酸盐的周期性极化的准相位匹配仍然具有挑战性。在这里，我们提出了700 nm厚的x切割氧化镁掺杂的锂的薄膜，使用电场极化的制造和极化的细节。我们在共面电极下引入二氧化硅绝缘层以减少漏电流。圆形尖端用于促进电极中心处的成核。获得了周期为7.5N、占空比为50%的均匀畴。的极化特性进行了比较，散装锂碳酸盐，与二氧化硅绝缘层和没有。的域的特征在于通过piezoresponse力显微镜，氢氟酸蚀刻，和波导二次谐波产生在1550 nm波长的薄膜锂的微晶玻璃波导加载氮化硅条。(C)根据OSA开放获取出版协议的条款，2019年美国光学学会
Ion-sliced lithium niobate thin films offer high optical confinement over their bulk counter parts, enabling compact and efficient nonlinear optics. Quasi-phase matching by periodic poling of thin film lithium niobate remains challenging, however, due to large leakage currents, especially in magnesium oxide doped lithium niobate, which is used in bulk to reduce photorefractive damage. Here we present fabrication and poling details of 700 nm thick x-cut magnesium oxide doped lithium niobate thin films using electric field poling. We introduce a silicon dioxide insulation layer under co-planar electrodes to reduce leakage current. Rounded tips are utilized to encourage nucleation at the center of the electrodes. Uniform domains with 7.5 Inn period and 50% duty cycle are achieved. The poling characteristics are compared to bulk lithium niobate, with and without the silicon dioxide insulation layer. The domains are characterized by piezoresponse force microscopy, hydrofluoric etching, and waveguide second harmonic generation at 1550 nm wavelength in a thin film lithium niobate waveguide loaded with a silicon nitride strip. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement