Elastic Double Structure of Amorphous Carbon Pillar Grown by Focused-Ion-Beam Chemical Vapor Deposition

Elastic Double Structure of Amorphous Carbon Pillar Grown by Focused-Ion-Beam Chemical Vapor Deposition
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聚焦离子束化学气相沉积非晶碳柱的弹性双结构

DOI:
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发表时间:
2007
期刊:
Jpn. J. Appl. Phys 46
影响因子:
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通讯作者:
and S. Matsui
and S. Matsui
中科院分区:
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文献类型:
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作者:
J. Fujita;S. Okada;R. Uekil;M. Ishida;T. Kaito;and S. Matsui

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