Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer

Design and fabrication of a miniaturized six-degree-of-freedom piezoresistive accelerometer
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DOI:
10.1088/0960-1317/15/9/017
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发表时间:
2005-07
影响因子:
2.3
通讯作者:
R. Amarasinghe;D. Dao;T. Toriyama;S. Sugiyama
R. Amarasinghe;D. Dao;T. Toriyama;S. Sugiyama
中科院分区:
工程技术4区
文献类型:
--
作者:
R. Amarasinghe;D. Dao;T. Toriyama;S. Sugiyama

文献摘要

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提出了一种小型化的六自由度压阻式加速度传感器。该加速度计能够在300 Hz的频率带宽下测量三个正交轴上的三个分量的线加速度和三个分量的角加速度。实验结果与有限元模拟结果吻合良好。该传感器非常适合用于需要检测多个加速度分量的生物力学研究应用,例如人类手势识别系统的研究。
This paper presents a miniaturized six-degree-of-freedom (6-DOF) piezoresistive accelerometer. The accelerometer is capable of measuring three components of linear acceleration and three components of angular acceleration on three orthogonal axes at the frequency bandwidth of 300 Hz. The obtained experimental results showed good agreement with the finite element simulation. The sensor is ideal for use in biomechanical research applications requiring detection of multiple components of acceleration such as the study of human gesture recognition systems.