Passivation of cut edges and surfaces of crystalline silicon by heat treatment in liquid water
Passivation of cut edges and surfaces of crystalline silicon by heat treatment in liquid water
复制标题
通过液态水中热处理钝化晶体硅的切割边缘和表面
DOI:
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Tomohisa Mizuno
中科院分区:
文献类型:
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作者:
Masahiko Hasumi;Toshiyuki Sameshima;Tomohisa Mizuno