A silicon microring resonator with a nanolatch mechanism
A silicon microring resonator with a nanolatch mechanism
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DOI：
10.1007/s00542-014-2283-8
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发表时间：
2015-09-01
影响因子：
2.1
通讯作者：
Hane, Kazuhiro
中科院分区：
文献类型：
--
作者：
Abe, Syotaro;Hane, Kazuhiro
设计并制作了一种具有波导锁存机构的微环谐振器，并将其制作在绝缘体上硅片上作为可切换陷波滤光片。波导的宽度为400 nm，厚度为260 nm。闩锁机构由三个带有纳米挂钩的超小型静电梳齿驱动器组成。其中一个致动器用于将母线波导移动到微环，另外两个致动器用于锁存母线波导。母线波导在关断状态下与微环解耦，并且在开通状态下耦合到微环以在谐振波长处进行滤波。母线波导的位置由闩锁的钩子保持，不施加电压。锁存后母线波导与微环之间的间隙约为108 nm，对应于微环谐振器的欠耦合条件。向两个锁存致动器施加另一个电压，母线波导被释放并返回到初始关断状态。所提出的纳米匹配机制对于使用微环谐振器的可重构光子电路是有用的。
A microring resonator with a waveguide latch mechanism is designed and fabricated on silicon-on-insulator wafer as switchable notch filter. The waveguide is 400 nm in width and 260 nm in thickness. The latch mechanism consists of three ultrasmall electrostatic comb-drive actuators with nano hooks. One of the actuators is used for moving busline waveguide to the microring and the other two actuators are used for latching the busline waveguide. The busline waveguide is decoupled from the microring in the switch-off state, and it is coupled to the microring in the switch-on state to filter at the resonant wavelength. The position of the busline waveguide is hold by the hooks of latches without applying voltage. The gap between the busline waveguide and the microring was approximately 108 nm after latching, which corresponded to an undercoupling condition of the microring resonator. Applying another voltage to the two latch actuators, the busline waveguide was released and returned to the initial switch-off state. The proposed nanolatch mechanism is useful for reconfigurable photonic circuits using microring resonators.