Determination of effective mechanical properties of a double-layer beam by means of a nano-electromechanical transducer
Determination of effective mechanical properties of a double-layer beam by means of a nano-electromechanical transducer
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DOI：
10.1063/1.4896785
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发表时间：
2014-09-29
影响因子：
4
通讯作者：
Gross, Rudolf
中科院分区：
文献类型：
--
作者：
Hocke, Fredrik;Pernpeintner, Matthias;Gross, Rudolf
我们研究了嵌入机电系统的双夹紧双层纳米梁的力学性能。纳米梁由高度预应力的氮化硅和超导铌层组成。通过测量线性和非线性Duffing状态下的力学位移谱密度，确定了纳米梁的预应力和有效杨氏模量。分析双层模型定量地证实了测量值。这表明，该模型可用于设计机械多层系统的电和光机械设备，包括由外部参数可控的材料，如压电，磁致伸缩，或更一般的多铁性材料。(C) 2014 AIP出版有限责任公司
We investigate the mechanical properties of a doubly clamped, double-layer nanobeam embedded into an electromechanical system. The nanobeam consists of a highly pre-stressed silicon nitride and a superconducting niobium layer. By measuring the mechanical displacement spectral density both in the linear and the nonlinear Duffing regime, we determine the pre-stress and the effective Young's modulus of the nanobeam. An analytical double-layer model quantitatively corroborates the measured values. This suggests that this model can be used to design mechanical multilayer systems for electro- and optomechanical devices, including materials controllable by external parameters such as piezoelectric, magnetostrictive, or in more general multiferroic materials. (C) 2014 AIP Publishing LLC.