Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform
Connected box-units-based compact highly clean environment for cross-disciplinary experiments platform
复制标题
基于连体盒单元的紧凑型高洁净环境的跨学科实验平台
DOI：
10.1049/el:20051053
复制
发表时间：
2005
影响因子：
1.1
通讯作者：
Nobuyoshi Kawaguchi
中科院分区：
文献类型：
--
作者：
A. Ishibashi;H. Kaiju;Y. Yamagata;Nobuyoshi Kawaguchi
对在连接的箱体单元系统中实现清洁环境进行了分析。通过将出口空气反馈到箱体单元的入口，系统中的稳态空气颗粒计数变得与环境颗粒计数无关，并且几乎不依赖于过滤器的颗粒捕获效率。事实证明，无论环境有多尘，都可以通过多功能的广泛连接的盒单元系统以经济紧凑的方式实现 ISO 3（209D 1 级）清洁度。
Analysis of achieving a clean environment in a connected box-units system is performed. By feedback of outlet air into the inlet of the box-unit, the steady-state airborne-particle-count in the system becomes independent of the ambient particle count and depends little on the particle-arrest efficiency of the filter. It is demonstrated that ISO 3 (209D Class 1) cleanliness in an inexpensive compact manner with the versatile extensive connected box-units system can be realised, no matter how dusty the ambient.