Bridging the Synthesis Gap: Ionic Liquids Enable Solvent-Mediated Reaction in Vapor-Phase Deposition
Bridging the Synthesis Gap: Ionic Liquids Enable Solvent-Mediated Reaction in Vapor-Phase Deposition
复制标题
缩小合成差距：离子液体在气相沉积中实现溶剂介导的反应
DOI：
10.1021/acsnano.0c09329
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发表时间：
2021
期刊：
影响因子：
17.1
通讯作者：
Bent, Stacey F.
中科院分区：
文献类型：
--
作者：
Shi, Jingwei;Bent, Stacey F.
分子层沉积（MLD）是一种有吸引力的气相沉积方法，适用于需要有机材料的应用，如光刻，锂电池和微电子。通过使用连续的自限性表面反应，MLD提供了对厚度和保形性的出色控制，但也存在挑战，例如可能的膜成分范围有限和沉积时间长。在这项研究中，我们介绍了一种改进的技术，称为离子液体辅助MLD（IL-MLD），可以克服这些障碍。通过在相容性离子液体（IL）的中间层内部进行表面反应，溶剂效应在真空系统内复制，将可能的反应扩展到更广泛的化学反应。使用这种策略，聚醚酮酮，一个工业和研究相关的，高性能的热塑性塑料的MLD的报告。有了这个概念验证，我们证明了IL-MLD可以使聚合物的合成通过溶剂或催化剂介导的反应，并建立一种方法，可以允许溶液化学在其他气相沉积技术以及访问。
Molecular layer deposition (MLD) is an attractive, vapor-phase deposition method for applications requiring ultrathin organic materials, such as photolithography, lithium batteries, and microelectronics. By using sequential self-limiting surface reactions, MLD offers excellent control over thickness and conformality, but there are also challenges such as a limited range of possible film compositions and long deposition times. In this study, we introduce a modified technique, termed ionic liquid assisted MLD (IL-MLD), that can overcome these barriers. By performing the surface reactions inside of an ultrathin layer of a compatible ionic liquid (IL), solvent effects are replicated inside a vacuum system, broadening the possible reactions to a much wider suite of chemistries. Using this strategy, the MLD of polyetherketoneketone, an industrially and research-relevant, high-performance thermoplastic, is reported. With this proof-of-concept, we demonstrate that IL-MLD can enable the synthesis of polymersviasolvent- or catalyst-mediated reactions and establish an approach that may allow solution chemistries to be accessed in other vapor deposition techniques as well.