Gas-barrier enhancement of polymer sheet by plasma-based ion implantation
Gas-barrier enhancement of polymer sheet by plasma-based ion implantation
复制标题
DOI：
10.1016/j.surfcoat.2004.08.155
复制
发表时间：
2005-06
影响因子：
5.4
通讯作者：
N. Sakudo;H. Endo;R. Yoneda;Y. Ohmura;N. Ikenaga
中科院分区：
文献类型：
--
作者：
N. Sakudo;H. Endo;R. Yoneda;Y. Ohmura;N. Ikenaga
采用等离子体基离子注入（PBII）对聚对苯二甲酸乙二醇酯（PET）进行表面改性。将0.1 mm厚的PET片材置于金属保持器上的等离子体中，所述金属保持器被提供有负高压脉冲。我们以前曾报道过，大多数PET分子在近表面体积被破坏，并通过10 keV的氮离子注入制成无定形碳。拉曼光谱表明，类金刚石碳（DLC）层的产生。在本文中，我们测量了CO2和O2渗透率的变化，通过表面改性的PET片材作为离子剂量的函数。结果表明，能量为10 keV、剂量为6× 1016 ions/cm ~ 2的氮离子注入使PET薄膜的CO_2和O_2透过率分别降低到未处理薄膜的1/10和1/6。利用这些测量值，局部气体阻隔增强，这是限制在改性层，也进行了讨论。由于改性层的厚度小于100 nm（0.1 μm），即PET片厚度的1000分之一，因此离子注入层的局部磁导率的降低对于CO2分别为2×10 - 4，对于O2分别为1.1×10 - 4。
Surfaces of polyethylene terephthalate (PET) are modified by plasma-based ion implantation (PBII). PET sheets of 0.1 mm thickness are put in plasma on a metallic holder that is supplied with negative high voltage pulses. We have previously reported that most PET molecules in the near surface volume are destroyed and made into amorphous carbon by 10 keV nitrogen ion implantation. Raman spectra have indicated the generation of diamond-like carbon (DLC) layer. In this paper, we measure the variations of CO2and O2permeability through the surface-modified PET sheets as a function of ion dose. As a result, nitrogen ion implantation with 10 keV in energy and 6×1016ions/cm2in dose reduces CO2and O2permeability for the PET sheets down to 1/10 and 1/6 of times the values for those of the untreated sheets, respectively. Using these measured values, the local gas-barrier enhancement, which is restricted to the modified layer, is also discussed. Since the modified-layer thickness is less than 100 nm (0.1 μm), i.e. 1000th of the PET sheet thickness, the reductions of local permeability for ion-implanted layer are 2×10−4for CO2and 1.1×10−4for O2, respectively.