Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film
Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film
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压电 PZT 厚膜驱动的单片微悬臂梁传感器的谐振特性和质量灵敏度
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发表时间：
2006
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通讯作者：
Tae Song Kim
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作者：
Jae Hong Park;Taeyun Kwon;Hyung J. Kim;Seungkyeum Kim;D. Yoon;C. Cheon;Hwan Kim;Tae Song Kim
利用MEMS工艺制备的PZT厚膜悬臂梁器件由于其较大的驱动力和相对较高的灵敏度，特别是在液体中，适合作为生物传感器或传感器而备受关注。利用共振行为，对PZT厚膜悬臂梁器件进行了理论计算和实验验证，在此之前还没有人对其进行研究。因此，本研究重点对PZT厚膜悬臂梁的灵敏度进行了分析和解释。特别是PZT厚膜悬臂梁的质量灵敏度研究，对于物理、化学和生物传感应用具有重要意义。采用丝网印刷法和MEMS工艺在铂/二氧化钛/氮化硅/硅衬底上制备了PZT厚膜悬臂梁器件。用光学激光干涉测振仪测量了系统的简谐振荡响应(共振频率)。研究了悬臂梁几何形状对共振频率变化的影响。实验测得的PZT微机械厚膜悬臂梁的谐振频率与加载质量时的理论频率变化相比，变化幅度小于2%。对于400×380μm、400×480μm和400×580μm悬臂梁，质量灵敏度分别为30.7pg/Hz、57.1pg/Hz和152.0 pg/Hz。
The PZT thick film cantilever devices fabricated via MEMS process have much attraction because they are appropriate for biological transducer or sensor, resulting from their large actuating force and relatively high sensitivity especially in liquid. By means of resonance behavior, theoretical calculation and experimental verification of the PZT thick film cantilever devices have not been studied before. Accordingly, we focused on the sensitivity analysis and interpretation of the PZT thick film cantilevers in this study. Especially, the investigation for mass sensitivity of the PZT thick film cantilever is of importance for physical, chemical and biological sensing application. The PZT thick film cantilever devices were constructed on Pt/TiO2/SiNX/Si substrates using screen printing method and MEMS process. The harmonic oscillation response (resonance frequency) was measured using an optical laser interferometric vibrometer. The effect of cantilever geometry on the resonance frequency change was investigated. Compared with the theoretical resonant frequency change by mass loading, the experimental resonant frequency change of the PZT micromechanical thick film cantilever shows a variation of less than 2%. Mass sensitivities are estimated to be 30.7, 57.1 and 152.0 pg/Hz for the 400 × 380 μm, 400 × 480 μm and 400 × 580 μm cantilever, respectively.