Fabrication and testing of a pair of passive bivalvular microvalves composed of p+ silicon diaphragms
Fabrication and testing of a pair of passive bivalvular microvalves composed of p+ silicon diaphragms
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DOI：
10.1016/s0924-4247(97)80097-0
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发表时间：
1996-10-01
影响因子：
4.6
通讯作者：
Yang, SS
中科院分区：
文献类型：
--
作者：
Yang, EH;Han, SW;Yang, SS
采用p +腐蚀停止法制作了一对单向无源微阀。这两种阀门结构简单，易于制造。每个阀门都由几个p +硅膜片组成，设计用于根据压差打开和关闭。阀门的制造工艺包括硼扩散和简单的各向异性蚀刻工艺。根据实验结果，在4kPa的正向压力下，水流量为1.6ml·min（-1），在4kPa的反向压力下，水流量为-0.05ml·min（-1）。
A pair of one-way passive microvalves is fabricated by using the p + etch-stop method. The two valves have a simple structure and are easy to fabricate. Each valve consists of several p + silicon diaphragms and is designed to open and close depending on the pressure difference. The fabrication process of the valves consists of a boron diffusion and simple anisotropic etch processes. According to the experimental results, the water flow rate is 1.6 ml min(-1) at 4 kPa of forward pressure and -0.05 ml min(-1) at 4 kPa of backward pressure.