Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters
Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters
复制标题
具有碳纳米管发射器的导电纳米结构的电子束诱导沉积
DOI：
10.1109/nano.2003.1231038
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
T. Fukuda
中科院分区：
文献类型：
--
作者：
F. Arai;P. Liu;L. Dong;M. Nakajima;T. Fukuda
Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)/sub 6/) and dimethyl-gold ((CH/sub 3/)/sub 2/(C/sub 5/H/sub 7/O/sub 2/)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)/sub 6/, mass of the tungsten reaches up to 80% among the compositions.
影响因子：
6.4
作者：
Dong, LX;Arai, F;Fukuda, T
通讯作者：
Fukuda, T