Analysis of NBTI Degradation- and Recovery-Behavior Based on Ultra Fast VT-Measurements
Analysis of NBTI Degradation- and Recovery-Behavior Based on Ultra Fast VT-Measurements
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基于超快 VT 测量的 NBTI 降解和恢复行为分析
DOI：
10.1109/relphy.2006.251260
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
C. Schlunder
中科院分区：
文献类型：
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作者：
H. Reisinger;O. Blank;W. Heinrigs;A. Muhlhoff;W. Gustin;C. Schlunder
我们提出了一种新的直接VT测量技术与任意选择的漏极电压和应力后的微秒延迟（1000倍的改善）。如图所示，该技术使得能够将数据与理论进行有意义的比较（例如，DeltaVT可测量为在10个十年时间内对100 μ s的应力时间的响应，以及在11个十年时间内对恢复的分析），这可以导致对NBTI的更好理解。一个快速的前体，由于大量捕获被发现显着影响降解斜率的所有时间。基于一个物理模型-标准反应/扩散模型加快速体捕获-只有3个拟合参数，可以很好地模拟实验降解和降解斜率<frac14 as well as >frac 14（均在文献中报告）可以解释。基于该物理模型的寿命外推法比常用的直线拟合法有上级的优越性。回收率数据与反应扩散理论没有令人满意的一致性。还需要进一步的实验和理论工作
We present a new direct VT measurement technique with arbitrary choice of drain voltage and a mus delay (factor of 1000 improvement) after stress. As shown this technique enables a meaningful comparison of data to theory (e.g. DeltaVT measurable as response to stress times from 100mus over 10 decades in time and an analysis of recovery over 11 decades in time) which may lead to a better understanding of NBTI. A fast precursor due to bulk trapping was found to significantly influence degradation slopes for all times. Based on a physical model - standard reaction/diffusion model plus fast bulk trapping -with just 3 fit parameters experimental degradation can be well modelled and degradation slopes <frac14 as well as > frac14 (both reported in literature) can be explained. A lifetime extrapolation based on this physical model is superior to the common straight line fit. There is no satisfying agreement of recovery data with reaction/diffusion theory. Further experimental and theoretical work is going to be needed