T.Kosugi,T.Yamashiro,R.Aihara,K.Gamo,S.Namba: "The characteristics of ion beam induced spontaneous etching of GaAs by low-energy focused ion beam irradiation" Jpn.J.Appl.Phys.30. 3242-3245 (1991)
T.Kosugi,T.Yamashiro,R.Aihara,K.Gamo,S.Namba: "The characteristics of ion beam induced spontaneous etching of GaAs by low-energy focused ion beam irradiation" Jpn.J.Appl.Phys.30. 3242-3245 (1991)
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T.Kosugi、T.Yamashiro、R.Aihara、K.Gamo、S.Namba:“低能聚焦离子束照射对 GaAs 的离子束诱导自发蚀刻的特性”Jpn.J.Appl.Phys.30。
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