Strain-induced effect on the Al incorporation in AlGaN films and the properties of AlGaN/GaN heterostructures grown by metalorganic chemical vapor deposition
Strain-induced effect on the Al incorporation in AlGaN films and the properties of AlGaN/GaN heterostructures grown by metalorganic chemical vapor deposition
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应变诱导效应对 AlGaN 薄膜中 Al 掺入的影响以及金属有机化学气相沉积生长的 AlGaN/GaN 异质结构的性能
DOI:
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发表时间:
2003
期刊:
影响因子:
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通讯作者:
Yu
中科院分区:
文献类型:
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作者:
J. Gong;W. Liao;Shyang;Po;Yu