Preparation of γ-Al2O3 films by laser chemical vapor deposition
Preparation of γ-Al2O3 films by laser chemical vapor deposition
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DOI：
10.1016/j.apsusc.2015.02.196
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发表时间：
2015-06-15
影响因子：
6.7
通讯作者：
Goto, Takashi
中科院分区：
文献类型：
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作者：
Gao, Ming;Ito, Akihiko;Goto, Takashi
采用CO2、Nd:YAG和InGaAs激光器制备了γ -和α - al2o3薄膜，研究了不同激光波长和沉积条件对相组成和微观结构的影响。在高总压下，CO2激光器主要生成α - al2o3薄膜，而Nd:YAG和InGaAs激光器生成γ - al2o3薄膜。γ - al2o3薄膜呈花椰菜状结构，α - al2o3薄膜呈致密柱状结构。在三种激光器中，Nd:YAG激光器与中间气体的相互作用最大。这促进了γ - al2o3在高总压下气相成核，这解释了观察到的纳米颗粒的花椰菜状结构。(C) 2015 Elsevier B.V.版权所有
gamma- and alpha-Al2O3 films were prepared by chemical vapor deposition using CO2, Nd:YAG, and InGaAs lasers to investigate the effects of varying the laser wavelength and deposition conditions on the phase composition and microstructure. The CO2 laser was found to mostly produce alpha-Al2O3 films, whereas the Nd:YAG and InGaAs lasers produced gamma-Al2O3 films when used at a high total pressure. gamma-Al2O3 films had a cauliflower-like structure, while the alpha-Al2O3 films had a dense and columnar structure. Of the three lasers, it was the Nd:YAG laser that interacted most with intermediate gas species. This promoted gamma-Al2O3 nucleation in the gas phase at high total pressure, which explains the cauliflower-like structure of nanoparticles observed. (C) 2015 Elsevier B.V. All rights reserved.