Amorphous carbon and carbon nitride multilayered films prepared by shielded arc ion plating
Amorphous carbon and carbon nitride multilayered films prepared by shielded arc ion plating
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DOI:
10.1016/j.tsf.2004.07.016
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发表时间:
2005-03
期刊:
影响因子:
2.1
通讯作者:
Kyunghwang Lee;R. Ohta;H. Sugimura;Y. Inoue;O. Takai
中科院分区:
文献类型:
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作者:
Kyunghwang Lee;R. Ohta;H. Sugimura;Y. Inoue;O. Takai