Advancing pressure sensors performance through a flexible MXene embedded interlocking structure in a microlens array
Advancing pressure sensors performance through a flexible MXene embedded interlocking structure in a microlens array
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DOI：
10.1007/s12274-023-5727-6
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发表时间：
2023-05
期刊：
影响因子：
9.9
通讯作者：
Tong Li;Zhenzong Xu;B. Xu;Zhanhu Guo;Yunhong Jiang;Xuehua Zhang;M. Bayati;T. Liu;Yan-Hua Liu
中科院分区：
文献类型：
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作者：
Tong Li;Zhenzong Xu;B. Xu;Zhanhu Guo;Yunhong Jiang;Xuehua Zhang;M. Bayati;T. Liu;Yan-Hua Liu
压阻复合弹性体具有灵敏度高、频率响应好、易于信号检测等优点，在可穿戴和柔性电子领域具有广阔的应用前景。研制了一种具有互锁结构的复合膜传感器，并证明了其优异的压力灵敏度、快速响应时间和低温漂特性。与基于MXene的柔性平板传感器（Ti3C2）相比，该互锁传感器的压力灵敏度显著提高了两个数量级（21.04 kPa−1），反应速度快至31 ms，循环寿命长达5000次。利用COMSOL中的固体力学模块计算了具有微透镜结构的聚二甲基硅氧烷（PDMS）薄膜模型的力分布，证实了传感器在响应各种外部刺激时具有高变形能力的可行性。与传统工艺不同，我们利用三维（3D）激光直写光刻设备，通过可变曝光剂量将高精度3D数据直接转换为微纳米结构形态，从而减少了热熔步骤。此外，柔性压力设备能够检测和区分从手指运动到人类脉搏的信号，甚至用于语音识别。这种简单、方便、大幅面的光刻方法为开发新型人机交互设备提供了新的机会。
Piezoresistive composite elastomers have shown great potentials for wearable and flexible electronic applications due to their high sensitivity, excellent frequency response, and easy signal detection. A composition membrane sensor with an interlocked structure has been developed and demonstrated outstanding pressure sensitivity, fast response time, and low temperature drift features. Compared with a flexible MXene-based flat sensor (Ti3C2), the interlocked sensor exhibits a significantly improved pressure sensitivity of two magnitudes higher (21.04 kPa−1), a fast reaction speed of 31 ms, and an excellent cycle life of 5000 test runs. The viability of sensor in responding to various external stimuli with high deformation capacity has been confirmed by calculating the force distribution of a polydimethylsiloxane (PDMS) film model with a microlens structure using the solid mechanics module in COMSOL. Unlike conventional process, we utilized three-dimensional (3D) laser-direct writing lithography equipment to directly transform high-precision 3D data into a micro-nano structure morphology through variable exposure doses, which reduces the hot melting step. Moreover, the flexible pressure device is capable of detecting and distinguishing signals ranging from finger movements to human pulses, even for speech recognition. This simple, convenient, and large-format lithographic method offers new opportunities for developing novel human–computer interaction devices.