High coupling, zero TCD SH wave on LGX

High coupling, zero TCD SH wave on LGX
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LGX 上的高耦合、零 TCD SH 波

DOI:
10.1109/ultsym.2002.1193425
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发表时间:
2002
期刊:
2002 IEEE Ultrasonics Symposium, 2002. Proceedings.
影响因子:
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通讯作者:
T. Pollard
T. Pollard
中科院分区:
--
文献类型:
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作者:
M. Pereira da Cunha;D. Malocha;D. Puccio;J. Thiele;T. Pollard

文献摘要

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本文报道了LGX家族晶体的纯剪切水平(SH)模式的预测和实测性质,其中包括langasite (LGS), langanite (LGN)和langate (LGT)。我们的研究结果表明,沿LGX欧拉角(0/spl°/,/spl θ /, 90/spl°/)和/spl θ /,在10/spl°/和25/spl°/之间,具有高机电耦合和零温度延迟系数(TCD),穿透深度与SAW器件相当。特别是沿着LGT (0/spl度/,13.5/spl度/,90/spl度/)方向,使用谐振器和延迟线结构的实验结果证实了高机电耦合(0.8%),比旋转石英SH方向36/spl度/ Y强约10倍,并且在140 *C左右零TCD。7波长的穿透深度比36/spl度/ Y石英浅约8倍。2660 m/s的相速度在计算值的0.2%以内,比36/spl度/ Y石英的相速度低约55%,从而使表面横波(STW)器件变小。有了这样积极的预测和测量耦合和传播特性,这些方向表明制造高耦合,零TCD和更小的STW器件用于液体传感器,滤波和频率控制应用。
This paper reports predicted and measured properties of the pure shear horizontal (SH) mode for the LGX family of crystals, which includes langasite (LGS), langanite (LGN), and langatate (LGT). Our results show high electromechanical coupling and zero temperature coefficient of delay (TCD) along LGX Euler angles (0/spl deg/, /spl theta/, 90/spl deg/), /spl theta/ between 10/spl deg/ and 25/spl deg/, with penetration depths which are comparable to SAW devices. In particular along LGT (0/spl deg/, 13.5/spl deg/, 90/spl deg/), experimental results are disclosed with resonators and delay line structures which verify the high electromechanical coupling (0.8%), about 10 times stronger than the 36/spl deg/ Y rotated quartz SH orientation, and zero TCD around 140 *C. The penetration depth of 7 wavelengths is about eight times shallower than 36/spl deg/ Y quartz. The phase velocity of 2660 m/s is within 0.2% of the calculated value, which is about 55% below the phase velocity of 36/spl deg/ Y quartz, thus leading to smaller Surface Transverse Wave (STW) devices. With such positive predicted and measured coupling and propagation characteristics, these orientations suggest the fabrication of high coupling, zero TCD, and smaller STW devices for liquid sensor, filtering, and frequency control applications.