Fabrication of Polymer Microneedle Electrodes Coated with Nanoporous Parylene
Fabrication of Polymer Microneedle Electrodes Coated with Nanoporous Parylene
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DOI：
10.7567/jjap.52.06gl10
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发表时间：
2013-06-01
影响因子：
1.5
通讯作者：
Miki, Norihisa
中科院分区：
文献类型：
--
作者：
Nishinaka, Yuya;Jun, Rina;Miki, Norihisa
在这项研究中，我们展示了制造的聚合物微针电极覆盖的纳米多孔聚对二甲苯膜，可以作为灵活的电极的脑机接口。在脑电波测量中，电极的电阻抗在15 Hz时应低于10 k Ω，并且需要保护导电层以使其插入角质层中而不受影响。聚合物微针可用作柔性电极的基底，其可补偿皮肤的移动;然而，导电金属膜（例如银膜）与聚合物（例如聚（二甲基硅氧烷）（PDMS））之间的粘附力较弱。因此，我们在气相沉积银膜之后，用纳米多孔聚对二甲苯膜涂覆电极表面。当聚对二甲苯膜的孔隙率适当时，其保护银膜，同时允许电极具有足够的导电性。可以通过调节用于沉积的聚对二甲苯二聚体的量或聚对二甲苯膜厚度来控制孔隙率。我们通过实验验证，当聚对二甲苯膜的厚度在25和38 nm之间时，导电膜被成功地保护，同时保持低于10 k Ω的电导率。(C)2013日本应用物理学会
In this study, we demonstrate the fabrication of polymer microneedle electrodes covered with a nanoporous parylene film that can serve as flexible electrodes for a brain-machine interface. In brain wave measurement, the electric impedance of electrodes should be below 10 k Omega at 15 Hz, and the conductive layer needs to be protected to survive its insertion into the stratum corneum. Polymer microneedles can be used as substrates for flexible electrodes, which can compensate for the movement of the skin; however, the adhesion between a conductive metal film, such as a silver film, and a polymer, such as poly(dimethylsiloxane) (PDMS), is weak. Therefore, we coated the electrode surface with a nanoporous parylene film, following the vapor deposition of a silver film. When the porosity of the parylene film is appropriate, it protects the silver film while allowing the electrode to have sufficient conductivity. The porosity can be controlled by adjusting the amount of the parylene dimer used for the deposition or the parylene film thickness. We experimentally verified that a conductive membrane was successfully protected while maintaining a conductivity below 10 k Omega when the thickness of the parylene film was between 25 and 38 nm. (C) 2013 The Japan Society of Applied Physics