Time-Resolved Electron Energy Distribution Function in Pulsed Surface Wave Plasma Generated by Ring-Slot Antenna
Time-Resolved Electron Energy Distribution Function in Pulsed Surface Wave Plasma Generated by Ring-Slot Antenna
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环缝天线产生的脉冲表面波等离子体中的时间分辨电子能量分布函数
DOI：
10.1143/jjap.42.l1188
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
Y. Okamoto
中科院分区：
文献类型：
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作者：
Hiroyuki Murohashi;T. Okamoto;Y. Okamoto
在高密度（> 10 ~（11）/cm ~ 3）、低电子温度（<2 eV）、均匀性好（直径24 cm ±3%）的脉冲调制氩等离子体中，用时间分辨探针测量了基片（晶片）保持器中的电子能量分布函数（EEDF）。等离子体产生的时间调制表面波电源与环缝天线。微波功率（2.45 GHz，最大1 kW）用100 µs持续时间和20-90%占空比的方波脉冲调制。EEDF的时间演变被分为两个区域，即，微波功率被打开的区域（活性等离子体区域：接通时间）和功率被关闭的区域（余辉等离子体区域：关断时间）。在第一个区域，EEDF显示出一个快速的演变，其中的高能电子（EEDF的高能尾部）的数量随时间增加。第二个区域的特征在于高能电子数量的显著减少和向低能值转移的EEDF的增加。这些特性进行了比较与连续驱动（CW）等离子体。
Time-resolved probe measurements of the electron energy distribution function (EEDF) in a substrate (wafer) holder were performed in a pulse-modulated argon plasma of high density (>1011/cm3), low electron temperature (<2 eV) and excellent uniformity (±3% over 24 cm diameter). The plasma was produced by a time-modulated surface wave power with a ring-slot antenna. Microwave power (2.45 GHz, 1 kW max.) was modulated with a square wave pulse of 100 µs duration and 20–90% duty ratio. The temporal evolution of the EEDF was divided into two zones, namely, the zone where the microwave power is turned on (active plasma region: on-time) and that where the power is turned off (afterglow plasma region: off-time). In the first zone, the EEDF shows a fast evolution in which the number of high-energy electrons (high-energy tail of EEDF) increases with time. The second zone is characterized by a significant decrease in the number of high-energy electrons and an increasing EEDF that shifts to low energy values. These characteristics were compared with those of the continuously driven (CW) plasma.