Anisotropic etching by electrospray for reduction in parasitic resistance of organic field-effect transistors
Anisotropic etching by electrospray for reduction in parasitic resistance of organic field-effect transistors
复制标题
通过电喷雾进行各向异性蚀刻以降低有机场效应晶体管的寄生电阻
DOI：
10.1016/j.orgel.2022.106673
复制
发表时间：
2023
影响因子：
3.2
通讯作者：
and Rei Mizoguchi
中科院分区：
文献类型：
--
作者：
Norio Onojima;Sayaka Hiruta;Masahiro Kashiwazaki;Masaki Kobayashi;and Rei Mizoguchi
使用卷对卷工艺（称为印刷电子）的生产制造对于低成本、大面积和高速制造有机器件有着很高的需求。然而，尽管大多数关于印刷工艺的研究都集中在薄膜的沉积上，但很少有研究报道与印刷工艺兼容的各向异性蚀刻的溶液方法。利用湿法工艺研究各向异性蚀刻对于印刷电子的进一步发展具有重要意义。在这里，我们使用电喷雾法（湿法工艺之一）对源极和漏极下方的底层有源层进行各向异性蚀刻，并证明有机场效应晶体管的寄生电阻降低。始终使用与薄膜沉积相同的蚀刻设备。因此，这项研究将为复杂的印刷电子产品铺平道路。
Productive manufacturing that uses a roll-to-roll process, called printed electronics, is highly demanded for low-cost, large-area, and high-speed fabrication of organic devices. However, although most studies on the printing process have been focused on the deposition of films, few studies are reported on solution methods for anisotropic etching that are compatible with the printing process. Studying anisotropic etching by using a wet process is a matter of great importance for the further development of printed electronics. Here, we conduct anisotropic etching by using an electrospray method, one of the wet processes, on an underlying active layer beneath source and drain electrodes and demonstrate a reduction in the parasitic resistance of organic field-effect transistors. The same equipment for the etching as the deposition of films was consistently used. Therefore, this study will pave the way for sophisticating printed electronics.