Charge neutralisation of insulating surfaces in the SEM by gas ionisation
Charge neutralisation of insulating surfaces in the SEM by gas ionisation
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通过气体电离对 SEM 中的绝缘表面进行电荷中和
DOI：
10.1088/0022-3727/11/17/002
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发表时间：
1978
期刊：
影响因子：
--
通讯作者：
L. B. Harris
中科院分区：
文献类型：
--
作者：
D. Moncrieff;V. Robinson;L. B. Harris
提出了一种理论，在该理论中，通过低压环境气体的扫描电子显微镜中的未涂覆的绝缘表面上的充电文物的消除被认为是由于电离的气体。从气体中和模型计算的离子电流对电离场的曲线给出了良好的协议与测量的离子电流通过金属试样的变化。这一结果允许在绝缘试样的表面发生的行为的精确解释。
A theory is presented in which the elimination of charging artefacts on uncoated insulating surfaces in the scanning electron microscope by a low-pressure ambient gas is taken to be due to ionisation of the gas. Curves of ion current against ionising field calculated from a model of gas neutralisation give good agreement with the variation of measured ion currents passing through metal specimens. This result permits a precise interpretation of the behavior occurring at the surface of insulating specimens.