A landmark-based 3D calibration strategy for SPM
A landmark-based 3D calibration strategy for SPM
复制标题
DOI：
10.1088/0957-0233/18/2/s12
复制
发表时间：
2007-02-01
影响因子：
2.4
通讯作者：
Koenders, Ludger
中科院分区：
文献类型：
--
作者：
Ritter, Martin;Dziomba, Thorsten;Koenders, Ludger
我们提出了一种对扫描探针显微镜 (SPM) 和其他高分辨率显微镜（例如显微镜）进行完整三维 (3D) 校准的新方法。例如，扫描电子显微镜 (SEM) 和共焦激光扫描显微镜 (CLSM)，通过应用具有级联斜阶金字塔形状的 3D 微米尺寸参考结构。 3D 参考结构是通过聚焦离子束诱导金属沉积产生的。与需要单独的横向和垂直参考标准（例如光栅和台阶高度结构）的倾斜校准程序相比，新方法包括使用地标，这些地标在更大规模的校准和测量任务中得到了很好的应用。然而，应用于新 3D 参考结构的地标尺寸为亚微米，即所谓的“纳米标记”。纳米标记坐标用于 SPM 以及其他仪器类型（如 SEM 和 CLSM）的扫描过程的几何校准。为此，开发了一种涉及三个比例因子和三个耦合因子的参数估计例程，仅允许在一个采样步骤中进行横向和垂直校准。通过这种新的校准策略，我们能够检测 SPM 横向缩放误差的偏差以及引起的耦合效应，例如。例如，取决于探头的测量高度位置的横向坐标偏移。
We present a new method for the complete three-dimensional (3D) calibration of scanning probe microscopes (SPM) and other high-resolution microscopes, e. g., scanning electron microscopes (SEM) and confocal laser scanning microscopes (CLSM), by applying a 3D micrometre-sized reference structure with the shape of a cascade slope-step pyramid. The 3D reference structure was produced by focused ion beam induced metal deposition. In contrast to pitch featured calibration procedures that require separate lateral and vertical reference standards such as gratings and step height structures, the new method includes the use of landmarks, which are well established in calibration and measurement tasks on a larger scale. However, the landmarks applied to the new 3D reference structures are of sub-micrometre size, the so-called 'nanomarkers'. The nanomarker coordinates are used for a geometrical calibration of the scanning process of SPM as well as of other instrument types such as SEM and CLSM. For that purpose, a parameter estimation routine involving three scale factors and three coupling factors has been developed that allows lateral and vertical calibration in only one sampling step. With this new calibration strategy, we are able to detect deviations of SPM lateral scaling errors as well as coupling effects causing, e. g., a lateral coordinate shift depending on the measured height position of the probe.