Optical Interference Type Micro Hydrophone Fabricated By Micro-machining
Optical Interference Type Micro Hydrophone Fabricated By Micro-machining
复制标题
微加工光干涉式微型水听器
DOI：
10.1190/1.1816644
复制
发表时间：
2001
期刊：
影响因子：
--
通讯作者：
M. Esashi
中科院分区：
文献类型：
--
作者：
H. Asanuma;S. Hashimoto;G. Suzuki;H. Niitsuma;M. Esashi
摘要利用MEMS技术制作了一个小型化水听器的原型。水听器的设计具有与常规商用水听器相当的性能。微型水听器由硅板和强化玻璃制成，它通过激光干涉来检测压力波。水听器的原型直径为9 mm，高度为13 mm。样机的频率响应范围为300 Hz至1000 Hz，但尚未评估绝对灵敏度。
Summary A prototype of a miniaturized hydrophone was fabricated using MEMS technologies. The hydrophone was designed to have a performance comparable to conventional commercially available hydrophones. The micro hydrophone was fabricated from a silicon plate and reinforced glass, and it detects pressure waves by using laser interference. The prototype of the hydrophone has a diameter of 9 mm and height of 13mm. The frequency response of the prototype had response from 300 Hz to 1000 Hz, although the absolute sensitivity has not yet been evaluated.