Improvement of discharge capacity of LiCoO2 thin-film cathodes deposited in trench structure by liquid-delivery metalorganic chemical vapor deposition
Improvement of discharge capacity of LiCoO2 thin-film cathodes deposited in trench structure by liquid-delivery metalorganic chemical vapor deposition
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DOI：
10.1063/1.1571958
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发表时间：
2003-05-12
影响因子：
4
通讯作者：
Yoon, SG
中科院分区：
文献类型：
--
作者：
Cho, SI;Yoon, SG
Pt collector and LiCoO2 cathode films were deposited onto trench-SiO2/Si substrates by liquid-delivery metalorganic chemical vapor deposition (LDMOCVD). The 100-nm-thick Pt thin films deposited at 350 degreesC showed the lowest resistivity and roughness and step-coverage of 57% in trench structure (aspect ratio-1). The LiCoO2 cathode films (step-coverage=51%) deposited onto a Pt collector showed an increase of approximately two and half times the discharge capacity compared with those of planar-cathode films. The LDMOCVD process is suitable to improve the discharge capacity of LiCoO2 cathode films using a trench structure in lithium rechargeable batteries. (C) 2003 American Institute of Physics.
