SAW reflection characteristics of Cu electrodes and their application to SAW IF devices

SAW reflection characteristics of Cu electrodes and their application to SAW IF devices
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Cu电极SAW反射特性及其在SAW IF器件中的应用

DOI:
10.1109/ultsym.2002.1193344
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发表时间:
2002
期刊:
2002 IEEE Ultrasonics Symposium, 2002. Proceedings.
影响因子:
--
通讯作者:
M. Yamaguchi
M. Yamaguchi
中科院分区:
--
文献类型:
--
作者:
T. Omori;S. Nakagomi;H. Tanaka;H. Asano;Kunihiko Hashimoto;M. Yamaguchi

文献摘要

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本文介绍了铜 (Cu) 电极在采用金属光栅反射器的 SAW 器件中的应用。理论和实验结果表明,128/spl deg/YX LiNbO/sub 3/上的Cu电极制成的金属光栅比相同厚度的Al电极制成的金属光栅具有更大的反射率。作为Cu电极在SAW IF器件中的应用之一,实验表明Cu-SPUDT的方向性比Al-SPUDT大10 dB。还讨论了可以通过使用铜电极来设计最佳加权的光栅反射器。结果得出结论,128/spl deg/YX - LiNbO/sub 3/ 上的 Cu 电极可以进一步提高采用金属光栅反射器的 SAW IF 器件的性能。
This paper describes the application of copper (Cu) electrodes to SAW devices employing metal grating reflectors. It is shown both theoretically and experimentally that the metal grating made of Cu electrodes on 128/spl deg/YX LiNbO/sub 3/ gives much larger reflectivity than that made of Al electrodes of the same thicknesses. As one of the applications of Cu electrodes to SAW IF devices, the directivity of Cu-SPUDT is shown experimentally to be 10 dB larger than that of Al-SPUDT. It is also discussed that optimally weighted grating reflectors can be designed by employing Cu electrodes. The result concludes that Cu electrodes on 128/spl deg/YX - LiNbO/sub 3/ could further enhance the performance of SAW IF devices employing metal grating reflectors.