Reliability Characterization of MEMS Materials
Reliability Characterization of MEMS Materials
复制标题
MEMS 材料的可靠性表征
DOI：
10.1541/ieejsmas.125.289
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
T. Tsuchiya
中科院分区：
文献类型：
--
作者：
T. Tsuchiya
本文综述了MEMS材料机械可靠性的测试、分析和评价方法，这对具有微小机械结构的MEMS器件的商业化具有重要意义。对MEMS中最常用的结构材料硅的可靠性进行了综述。
This review describes the testing,analyzing,and evaluating methods for the mechanical reliability of MEMS materials,which has much more importance on the commercialization of MEMS devices that has tiny mechanical structures. The reliability of silicon,the most often used materials as structure in MEMS,is also summarized.