Photonic crystal waveguides with propagation losses in the 1 dB/mm range
Photonic crystal waveguides with propagation losses in the 1 dB/mm range
复制标题
传播损耗在 1 dB/mm 范围内的光子晶体波导
DOI：
10.1116/1.1824053
复制
发表时间：
2004
影响因子：
1.4
通讯作者：
S. Anand
中科院分区：
文献类型：
--
作者：
J. Zimmermann;H. Scherer;M. Kamp;S. Deubert;J. Reithmaier;A. Forchel;R. März;S. Anand
在InGaAsP和GaAs材料系统中制备了通信波长分别为1.55和1.31 μm的高质量光子晶体波导。波导由省略的行的孔在一个三角形晶格的空气孔蚀刻到半导体异质结构的电子回旋共振反应离子蚀刻。在光传输测量中已经观察到有效的波导，波导损耗范围从具有三个缺失行的孔（W3）的波导的1.5dB scinmm到具有七个缺失行的波导的0.2dB scinmm（W7）。
High-quality photonic crystal waveguides have been fabricated in the InGaAsP∕InP and GaAs∕AlGaAs material systems aimed at the communication wavelengths of 1.55 and 1.31 μm. The waveguides consist of omitted rows of holes in a triangular lattice of air holes etched into the semiconductor heterostructures by electron cyclotron resonance reactive ion etching. Efficient waveguiding has been observed in optical transmission measurements, with waveguide losses ranging from 1.5dB∕mm for a waveguide with three missing row of holes (W3) to 0.2dB∕mm for seven missing rows (W7).