Hard nanocomposite Zr-Y-N coatings, correlation between hardness and structure
Hard nanocomposite Zr-Y-N coatings, correlation between hardness and structure
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DOI：
10.1016/s0257-8972(00)00560-0
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发表时间：
2000-05
影响因子：
5.4
通讯作者：
J. Musil;H. Poláková
中科院分区：
文献类型：
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作者：
J. Musil;H. Poláková
该文章报道了含有两种不混溶元素（Zr、Y）作为金属的 Zr-Y-N 纳米复合材料薄膜的结构和机械性能。使用直径为 100 mm 的圆形平面不平衡磁控管，在 Ar+N2 混合物中通过直流反应磁控溅射合金靶材 ZrY (80/20 at.%) 和 ZrY (93/7 at.%) 来制备薄膜。结果表明： (i) 薄膜的结构与其硬度 H 之间存在很强的相关性； （ii）可以通过在基底和Zr-Y-N薄膜之间插入中间层来控制薄膜结构； (iii)薄膜硬度取决于薄膜中的N/(Zr+Y)比率和ZrN晶粒的晶体取向。制备了硬度大于40 GPa的超硬纳米复合薄膜。这些薄膜的特点是 (i) X 射线从 ZrN(200) 晶粒反射，而没有从含 Y 的第二相反射； (ii)比率N/(Zr+Y)≈1。此外，还发现纯ZrY合金膜中掺入氮会导致其机械性能发生巨大变化。 Zr-Y-N 薄膜非常坚硬（高达 47 GPa），具有高弹性回复率（Weup 高达 83%）和高抗塑性变形能力 [H3/E*2 高达约 10%]。 0.75，其中E*=E/(1−ν2)，E是杨氏模量，ν是泊松比]。相反，ZrY合金膜很软（H≈6 GPa）并且表现出较低的弹性恢复率（We=32%）。
The article reports on structure and mechanical properties of Zr–Y–N nanocomposite films containing two immiscible elements (Zr, Y) as metals. Films were prepared by d.c.-reactive magnetron sputtering of alloyed targets ZrY (80/20 at.%) and ZrY (93/7 at.%) in a mixture of Ar+N2using round planar unbalanced magnetrons of diameter 100 mm. It was shown that: (i) there is a strong correlation between the structure of the film and its hardness, H; (ii) the film structure can be controlled with the interlayer inserted between the substrate and the Zr–Y–N film; and (iii) the film hardness depends on the ratio N/(Zr+Y) in the film and the crystallographic orientation of ZrN grains. Superhard nanocomposite films with hardness greater than 40 GPa were prepared. These films are characterized by (i) the X-ray reflection from ZrN(200) grains and no reflection from the second phase containing Y; and (ii) the ratio N/(Zr+Y)≈1. Also, it was found that the incorporation of nitrogen into the pure ZrY alloy film results in dramatic changes of its mechanical properties. The Zr–Y–N film can be very hard (up to 47 GPa), exhibits the high elastic recovery (Weup to 83%) and the high resistance to plastic deformation [H3/E*2up to approx. 0.75, where E*=E/(1−ν2), E is the Young’s modulus and ν is the Poisson’s ratio]. On the contrary, the ZrY alloy film is soft (H≈6 GPa) and exhibits a low elastic recovery (We=32%).