Many flaked particles generated by electric field stress working as an impulsive force in mass-production plasma etching equipment
Many flaked particles generated by electric field stress working as an impulsive force in mass-production plasma etching equipment
复制标题
在量产等离子蚀刻设备中，电场应力作为脉冲力产生许多片状颗粒
DOI：
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发表时间：
2015
期刊：
影响因子：
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通讯作者：
Fumihiko Uesugi
中科院分区：
文献类型：
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作者：
Yuji Kasashima;Fumihiko Uesugi
