Space resolved density measurements of argon and helium metastable atoms in radio-frequency generated He-Ar micro-plasmas
Space resolved density measurements of argon and helium metastable atoms in radio-frequency generated He-Ar micro-plasmas
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DOI：
10.1140/epjd/e2010-00166-8
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发表时间：
2010-06
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影响因子：
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通讯作者：
B. Niermann;M. Böke;N. Sadeghi;J. Winter
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文献类型：
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作者：
B. Niermann;M. Böke;N. Sadeghi;J. Winter
利用可调谐二极管激光吸收光谱技术测量了大气压射频微等离子体射流中氦He ~*（3S 1）和氩Ar ~*（3 P2）亚稳原子的空间分辨浓度。即使是小到10- 4的反射也可以用锁定技术测量。由测量的吸收速率，推导出不同功率、流量和混合气体条件下亚稳态原子密度的绝对值。介稳浓度范围为109 ~ 1011 cm-3。光谱轮廓的分析提供了两个亚稳原子的压力展宽系数的氦。得到了不同放电条件下等离子体中亚稳态原子的空间分布。电极之间的密度分布揭示了鞘层结构，并反映了放电体积中的等离子体激发分布。它揭示了α模式放电的优势。
Space resolved concentrations of helium He* (3S1) and argon Ar* (3P2) metastable atoms in an atmospheric pressure radio frequency micro-plasma jet were measured using tunable diode laser absorption spectroscopy. Even small absorptions down to 10-4could be measured using lock-in technique. The absolute density of metastable atoms densities at differentrf-power, flow rate and gas mixture was deduced from measured absorption rates. Metastable concentrations range from 109to 1011cm-3. Analysis of spectral profiles provided the pressure broadening coefficients of both metastable atoms by helium. The spatial distribution of metastable atoms in the plasma volume was obtained for various discharge conditions. Density profiles between the electrodes reveal the sheath structure and reflect the plasma excitation distributions in the discharge volume. It reveals the dominance of theα-mode discharge.