Dynamics of low capillary number interfaces moving through sharp features
Dynamics of low capillary number interfaces moving through sharp features
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DOI：
10.1063/1.2140691
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发表时间：
2005-12
影响因子：
4.6
通讯作者：
Shravanthi T. Reddy;P. Schunk;R. Bonnecaze
中科院分区：
文献类型：
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作者：
Shravanthi T. Reddy;P. Schunk;R. Bonnecaze
任何纳米压印工艺的成功都取决于其准确复制模板图案的能力。因此，模板中凹陷特征的完全填充是由流过这些尖锐结构的流动的动力学控制的重要问题。在这些小尺度上，毛细管力很大，必须包括在流体流动模型中。在低毛细管数下，通过尖锐的矩形特征的界面推进机制对于理解特征如何以及为什么填充或滞留空气是有用的。在这项研究中，我们提出了一种二维模拟这种特征填充，以捕捉过程的细节，包括粘性和毛细效应。流体被注入模板和衬底之间的通道中，在那里流体-空气界面很快遇到一个矩形特征，其高度大于通道间隙。当流体通过通道时，由于强大的毛细管力，界面的形状为圆弧。该接口维护...
The success of any nanoimprint process depends upon its ability to exactly reproduce the template pattern. Thus, complete filling of recessed features in the template is an important issue that is controlled by the dynamics of the flow through these sharp structures. At these small scales, capillary forces are large and must be included in the fluid flow model. The mechanism of interface advancement at low capillary number through sharp rectangular features is useful for understanding how and why features fill or trap air. In this study we present a two-dimensional simulation of this feature filling to capture the details of the process, including the viscous and capillary effects. Fluid is injected into the channel between the template and substrate, where the fluid–air interface soon encounters a rectangular feature with some height greater than the channel gap. As the fluid advances through the channel, the shape of the interface is a circular arc due to the strong capillary forces. The interface maint...