Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO3/Pt/MgO Epitaxial Structure
Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO3/Pt/MgO Epitaxial Structure
复制标题
PbTiO3/Pt/MgO 外延结构中晶体结构和晶格参数对膜厚的依赖性
DOI：
10.1143/jjap.35.4913
复制
发表时间：
1996
影响因子：
1.5
通讯作者：
K. Matsushige
中科院分区：
文献类型：
--
作者：
H. Fujisawa;M. Shimizu;T. Horiuchi;T. Shiosaki;K. Matsushige
在PbTiO3（厚度为2.2 ~ 398 nm）/Pt/MgO（100）结构中，采用θ-2θ XRD法和能量色散型全反射x射线衍射法（ED-TXRD）研究了PbTiO3薄膜的晶体结构和晶格参数与薄膜厚度的关系。利用ED-TXRD方法，我们可以很容易地评价岛状PbTiO3薄膜在生长初期的面内结构。虽然PbTiO3薄膜是高度c轴取向的，但随着厚度的增加，可以观察到一些a畴的形成。与平面上的晶格参数不同，垂直尺寸的晶格参数与薄膜厚度有关。从这些实验结果出发，讨论了PbTiO3薄膜中的内应变。
In PbTiO3 (2.2–398 nm in thickness)/Pt/MgO(100) structure, the dependence of the crystalline structure and lattice parameters of PbTiO3 thin films on the film thickness was investigated using the θ-2θ XRD method and the energy dispersive typed total reflection X-ray diffraction method (ED-TXRD). By using the ED-TXRD method, we can easily evaluate the in-plane structure of island-structured PbTiO3 films at the initial growth stage. Although the PbTiO3 thin films were highly c-axis orientated, the formation of some a-domains was observed with increasing thickness. The lattice parameters of the vertical dimension were dependent on the film thickness, unlike those in-plane. From these experimental results, the inner strain occurring in PbTiO3 thin films is discussed.