Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering
Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering
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电离区漂移的电势峰：高功率脉冲磁控溅射的“螺旋桨叶片”
DOI：
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发表时间：
2013
期刊：
影响因子：
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通讯作者：
P. Ni
中科院分区：
文献类型：
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作者：
A. Anders;M. Panjan;R. Franz;J. Andersson;P. Ni
测量的高功率脉冲磁控溅射的离子能量分布函数表现出在几个10 eV处有一个宽峰和一个延伸的尾部，以及相对于E×B的不对称性，其中E和B分别是局部电场矢量和磁场矢量。本文提出，这些特征是由于在每个移动电离区形成了几个10 V的电位驼峰。势能驼峰的形成与负-正-负空间电荷有关，这种电荷在高能漂移电子驱动的电离区自然形成。
Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to E×B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.