Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators

Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators
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DOI:
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发表时间:
2020
期刊:
International Journal of Non-Linear Mechanics
影响因子:
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通讯作者:
Yu Huang
Yu Huang
中科院分区:
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文献类型:
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作者:
Ming Lyu;Jian Zhao;Najib Kacem;Pengbo Liu;Bin Tang;Zhuang Xiong;Hongxi Wang;Yu Huang

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