ATMOSPHERIC PLASMA TREATMENT OF ITO THIN FILMS FOR RAPID MANUFACTURING OF PEROVSKITE SOLAR CELLS
ATMOSPHERIC PLASMA TREATMENT OF ITO THIN FILMS FOR RAPID MANUFACTURING OF PEROVSKITE SOLAR CELLS
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ITO 薄膜的大气等离子体处理用于快速制造钙钛矿太阳能电池
DOI：
10.37904/nanocon.2019.8645
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发表时间：
2020
期刊：
影响因子：
--
通讯作者：
J. Pospíšil
中科院分区：
文献类型：
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作者：
T. Homoľa;Masoud Shekargoftar;J. Pospíšil
基于硅的现代能量收集系统和其他电子产品的制造的主流模式不能满足低成本制造中所涉及的步骤的要求。快速和低成本的卷对卷制造柔性和印刷电子产品商业化的未来需要柔性和低成本的基底，例如聚对苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯，以及最近的绿色材料，例如纳米纸。对于此类材料，每个制造阶段的温度都至关重要，不能超过一定的阈值，通常为150 °C或更低。因此，低温等离子体可以为未来的制造方法提供一个很好的发展方向。这项贡献提出了一种专有的大面积等离子体，具有极高的体积功率密度，高达100 W/cm 3，能够在露天以及包括氮气，氩气，甲烷，氢气，二氧化碳和纯水蒸汽在内的工业级气体中产生扩散，均匀和冷等离子体（<70 °C）。虽然等离子体的温度非常低，但能量状态的群体足以在一系列纳米结构材料和半导体（例如氧化石墨烯、二氧化钛、钙钛矿等）的表面上引起物理/化学变化，从而导致结晶度、光电和润湿性性质的各种变化，这取决于用于等离子体生成的气体。等离子体的低温和1- 10秒量级的快速处理时间使等离子体处理能够集成到卷对卷制造中，这是柔性和印刷电子新兴领域商业可行性的重要一步。该研究提供了氧化铟锡电极的快速（<1分钟）低温等离子体处理的示例，作为在p-i-n钙钛矿太阳能电池中沉积PEDOT：PSS之前耗时的化学处理的替代。
Prevailing modes of the manufacture of modern energy-harvesting systems and other electronics based on silicon fail to meet the requirements of the steps involved in low-cost fabrication. Rapid and low-cost roll-to-roll manufacture the future of commercialization for flexible and printed electronics requires flexible and lowcost substrates such as polyethylene terephthalate, polyethylene naphthalate and, more recently, green materials such as nano-paper. The temperature at every single fabrication stage is crucial with such materials and cannot exceed a certain threshold, generally 150 °C or less. Low-temperature plasma, therefore can provide an excellent way forward for future manufacturing methods. This contribution presents a proprietary, large-area plasma of extremely high-volume power density, up to 100 W/cm3, capable of generating diffuse, homogeneous and cold plasma (<70 °C) in the open air, as well as in technical-grade gases including nitrogen, argon, methane, hydrogen, carbon dioxide and pure water vapour. Although the temperature of the plasma is very low, the population of energetic states is sufficient to induce physical/chemical changes on the surfaces of a range of nanostructured materials and semiconductors, such as graphene oxide, titanium dioxide, perovskites, and others, resulting in various changes to crystallinity, optoelectronic, and wettability properties depending on the gas employed for plasma generation. The low temperature of the plasma and rapid treatment times, in the order of 1-10s, enables the integration of plasma processing into roll-to-roll manufacture, a significant step forward in commercial viability within the emerging field of flexible and printed electronics. This study provides an example of rapid (<1 min) low-temperature plasma processing of indium-tin-oxide electrodes as a replacement for time-consuming chemical treatment before deposition of PEDOT:PSS in a p-i-n perovskite solar cell.